Increasing pumping efficiency in a micro throttle pump by enhancing displacement amplification in an elastomeric substrate

Fluid transport is accomplished in a micro throttle pump (MTP) by alternating deformation of a micro channel cast into a PDMS elastomeric substrate. The active deformation is achieved using a bimorph PZT piezoelectric disk actuator bonded to a glass diaphragm. The bimorph PZT deflects the diaphragm as well as alternately pushing and pulling the elastomer layer providing displacement amplification in the PDMS directly surrounding the micro channel. In order to improve pumping rates we have embedded a PMMA ring into the PMDS substrate which increases the magnitude of the displacement amplification achieved. FEM simulation of the elastomeric substrate deformation predicts that the inclusion of the PMMA ring should increase the channel deformation. We experimentally demonstrate that inclusion of a PMMA ring, having a diameter equal to that of the circular node of the PZT/glass/PDMS composite, increase in the throttle resistance ratio by 40 % and the maximum pumping rate by 90 % compared to an MTP with no ring. Submitted to: J. Micromech. Microeng. Increasing pumping efficiency in a micro throttle pump 2